Facile fabrication of single-crystal-diamond nanostructures with ultrahigh aspect ratio.
نویسندگان
چکیده
A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.
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ورودعنوان ژورنال:
- Advanced materials
دوره 25 29 شماره
صفحات -
تاریخ انتشار 2013